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China's self-developed ion implanter. /VCG
China's new independently developed ion implanter has boosted the country's domestic chip manufacturing chain and will facilitate global chip manufacturers, the China Electronics Technology Group Corporation (CETC)announced on Wednesday.
China used to depend on imported technology for chip manufacturing. However, the CETC's successful development of China's own ion implanterproducts, including medium beam, large beamand high energyion implanter, ion implanter for special applicationand the third generation semiconductor ion implanter, has boosted the country's efforts to achieve self-sufficiency.
Used in the 28-nanometer manufacturing process to create semiconductors, the ion implanter is not only criticalfor China's chip manufacturing industry, but it also provides a complete set of solutions for global chip manufacturing companies.
A critical piece of equipment in chip manufacturing, the ion implanter carries out the doping process of chip manufacturing where it is necessary to incorporate different kinds of elements to change the electrical properties of the material in a predetermined manner.
The elements are accelerated to a predetermined energy in the form of charged ions and implanted into a specific semiconductor material. This is the process of ion "implantation." Different implant doses, angles, depth and other factors will affect the performance, yield and life of a chip, and the ion implanter controls the entire process.
Boasting an accumulated 413 core invention patents, the CETC has achieved the independent innovation and development of ion implanter products, effectively repairing the broken chain in China's chip manufacturing sector.
According to one CETC insider, the next step will include accelerating its ion implanter research and development to achieve advanced process nodes and promote industrialization.
Famed as a major military electronics force in China, CETC is a "national team" in the Chinese internet and information industry,as well as a national strategic scientific and technological force. It has a relatively complete scientific and technological innovation system in the field of electronic information.
The CETC currently owns more than 500 enterprises and public institutions, including 47 national research institutes and 11 listed companies. It employs more than 200,000 people and has 35 key national laboratories, research and innovation centers.
